Protected technologies
and patent notices

Innovation across the LAB14 Group

LAB14 unites specialized high-tech companies with complementary systems, software, materials, and services for demanding applications in microfabrication, nanofabrication, and surface analysis. From lithography and 3D microfabrication to process software, precision production technologies, and nanoscale analysis, the Group’s portfolio supports research-driven and industrial innovation. Intellectual property is a key part of how LAB14 protects the engineering expertise, application knowledge, and development work behind these technologies.

This page provides centralized information on patent markings across our subsidiaries. It is designed to inform competitors, customers, business partners, suppliers, licensees, research institutions, and other interested parties about the Group’s technologies and protected innovations.

Group IP Portfolio

We use virtual patent marking as an efficient way to communicate the patent protection of our products. Instead of listing patent numbers directly on the product, we provide a short notice, such as “Patented” or “Patent pending”.

The following list includes only the US‑issued patents of the LAB14 Group that apply to its products and technologies. This list will be updated periodically as new patents are granted. The patent numbers provided serve as public notice of the existing intellectual property rights.


US Patent Number

Title

Patent Owner
US10870243B2Method and device for producing microstructures on optical fibersBADEN WURTTEMBERG STIFFUNG GMBH | NANOSCRIBE GMBH
US10401737B2Process dose and process bias determination for beam lithographyGenISys GmbH
US10409946B2Process artefact compensation upon transfer of a mask layout onto a mask substrateGenISys GmbH
US7826130B2Device for the optical splitting and modulation of electromagnetic radiationHeidelberg Instruments Mikrotechnik GmbH
US9176391B2Method and arrangement for displacementHeidelberg Instruments Mikrotechnik GmbH
US10836105B2Device and method for creating three-dimensional structuresHeidelberg Instruments Mikrotechnik GmbH
US8390790B2Method and apparatus for reproducing a programmable mask on a substrateHeidelberg Instruments Mikrotechnik GmbH
US9052608B2Method and device for imaging a radiation-sensitive substrateHeidelberg Instruments Mikrotechnik GmbH
US9921486B2Multiscale patterning of a sample with apparatus having both thermo-optical lithography capability and thermal scanning probe lithography capabilityHeidelberg Instruments Nano AG
US10209630B2Scanning probe nanolithography system and methodHeidelberg Instruments Nano AG
US9977050WEAR-LESS OPERATION OF A MATERIAL SURFACE WITH A SCANNING PROBE MICROSCOPEHeidelberg Instruments Nano AG
US8023393METHOD AND APPARATUS FOR REDUCING TIP-WEAR OF A PROBEHeidelberg Instruments Nano AG
US8986563B2Method for the production of three-dimensional microstructuresNanoscribe Holding GmbH
US9798248B2Method for producing a structureNanoscribe Holding GmbH
US9302430B2Method and device for a spatially resolved introduction of an intensity pattern comprising electro-magnetic radiation into a photosensitive substance as well as applications thereofNanoscribe Holding GmbH
US9937664B2Method for producing a three-dimensional structureNanoscribe Holding GmbH
US10118376B2Process for producing a three-dimensional structureNanoscribe Holding GmbH
US11179883B2Method for producing a 3D structure by means of laser lithography, and corresponding computer program productNanoscribe Holding GmbH
US10310385OPTICAL SYSTEM FOR PRODUCING LITHOGRAPHIC STRUCTURESNanoscribe Holding GmbH
US9989862OPTICAL SYSTEM FOR PRODUCING LITHOGRAPHIC STRUCTURESNanoscribe Holding GmbH
US11499990B2Atomic force microscope probes and methods of manufacturing probesNanosurf AG
US12571711B2Apparatus and method for determining mechanical properties of a systemNanosurf AG
US10564181B2Atomic force microscope with optical guiding mechanismNanosurf AG
US10981394B2Method for printing a varying pattern of landing zones on a substrate by means of ink-jet printingNotion Systems GmbH
US12414242B2Method for ink jet printing of a substrateNotion Systems GmbH
US12479227B2Method and device for printing on a substrate by way of inkjet printingNotion Systems GmbH
US11328918B2Device and method for electron transfer from a sample to an energy analyzer and electron spectrometer deviceSPECS Surface Nano Analysis GmbH
US9453893B2Spin detector arrangement for measuring the vector component of a spin vector predominating in a particle beamSPECS Surface Nano Analysis GmbH
US7773009HIGH RESOLUTION DIGITAL ANALOG CONVERSION CIRCUITSPECS Surface Nano Analysis GmbH